FACILITY

A space in which airborne contaminants (e.g., suspended fine particles and suspended microorganisms) are systematically controlled below a specified cleanliness level and air pollution control is implemented.
A space where the required cleanliness level is maintained for materials, chemicals, water, etc. supplied to the space, and where environmental conditions such as temperature, humidity, pressure, trace gas components, static electricity, microvibration, and electromagnetic waves are controlled as necessary.